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利用FactSage software软件进行热力学计算,获得了CH3SiCl3(MTS)-BCl3-H2体系在化学气相沉积环境中Si-B-C陶瓷的热力学产物图和相图。讨论了在高温(900～1100℃)、低压(2 kPa、5 kPa和12 kPa)条件下系统总压、温度和反应气体比例等参数对主要产物产率的影响。结果表明,在所研究的参数范围内,系统总压、温度和气体比例对B4C相的产率影响比较明显,而对SiC相的产率影响不明显。气体比例对C相的产率影响比较明显,温度和系统总压对C相的产率影响不明显。各参数的变化对主要气态产物(BHx、CxHy、SiClx等)的产率有一定程度的影响。稀释气体分压的增加有利于富B相的生成,MTS分压的增加有利于SiC的生成。
Thermodynamic calculations were performed using FactSage software to obtain thermodynamic product maps and phase diagrams of Si-B-C ceramics in a chemical vapor deposition environment of CH3SiCl3 (MTS) -BCl3-H2 system. The effects of system total pressure, temperature and reaction gas ratio on the yield of main products under high temperature (900 ~ 1100 ℃) and low pressure (2kPa, 5kPa and 12kPa) were discussed. The results show that the total pressure, temperature and gas ratio have obvious influence on the yield of B4C phase but not obvious on the yield of SiC phase. The influence of gas ratio on the yield of C phase is obvious. The influence of temperature and system total pressure on the yield of C phase is not obvious. The changes of the parameters have a certain impact on the yield of the main gaseous products (BHx, CxHy, SiClx, etc.). The increase of partial pressure of diluent gas is beneficial to the formation of B-rich phase. The increase of MTS partial pressure is favorable for the formation of SiC.