硅材料可分为单晶硅、多品硅和非晶硅。从结构上来说,单晶硅最简单,非晶硅最复杂。用这三种材料都可以制造压力传感器。这些压力传感器大致可以分成四种形式,即压阻式、电容式、MOS式和薄膜式。前三种主要以单晶硅制造,后一种主要以多晶硅和非晶硅制造。目前制造压力传感器仍以单晶硅为主,但从发展趋势来看似有向多品与非晶的薄膜式方向进展的势头。 Silicon materials can be divided into single crystal silicon, multi-product silicon and amorphous silicon. From the structural point of view, the simplest silicon, amorphous silicon is the most complex. Pressure sensors are available with all three materials. These pressure sensors can be roughly divided into four forms, namely piezoresistive, capacitive, MOS and thin film. The first three are mainly made of single-crystal silicon, the latter mainly made of polysilicon and amorphous silicon. Currently manufacturing pressure sensors are still based on single-crystal silicon, but from the trend of development seems to be multi-species and amorphous film trend direction.