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动态流量法超高真空标准装置是用于校准真空规的绝对真空计量标准。它由校准系统、恒压式气体微流量计和抽气系统组成。极限压力６．５×１０－９Ｐａ，校准范围１０－２～１０－７Ｐａ，不确定度３％（１０－２～１０－６Ｐａ）和１０％（１０－７Ｐａ）。
Dynamic Flow Method Ultra-high vacuum standard devices are absolute vacuum gauges used to calibrate vacuum gauges. It consists of a calibration system, a constant pressure gas micrometer and a suction system. The ultimate pressure is 6.5 × 10-9Pa, the calibration range is 10-2 ~ 10-7Pa, the uncertainty is 3% (10-2 ~ 10-6Pa) and 10% (10-7Pa).