放电准分子激光器的泵浦强度引言众所周知，准分子激光器要求相当高的泵浦强度水平。放电准分子激光器中一般的泵浦强度为每立方厘米几十兆瓦到几兆瓦［‘－’］，而且对于某些类型的准分子激光器，从最大泵浦效率的角度来看，这一参数的最佳值完全不同。例如，对于含氟气... Excitation Excimer Excimer Laser Pumping Strength Introduction It is well known that excimer lasers require relatively high pump intensity levels. Typical pump intensities in discharge excimer lasers range from tens of megawatts to a few megawatts per cubic centimeter and for some types of excimer lasers, from the point of maximum pump efficiency, this The best values ​​for the parameters are completely different. For example, for fluorine-containing gas ...