nanogrinding相关论文
The excellent chemical and mechanical properties of SiC single crystal make damage free surface preparation for SiC wafe......
Nanometer chips were directly fabricated using face nanogrinding carried out by ultrafine diamond grits at room temperat......
采用细粒度砂轮的纳米磨削来实现碳化硅晶片高平整度和低损伤加工新方法.磨削试验表明采用纳米磨削50.8 mm碳化硅晶片时其平整度在......
