一、前言表面粗糙度在机械、电子和光学领域中起着重要的作用。机械系统中的磨损是与相互作相对运动的接触表面的粗度密切相关的。硅片或计算机磁盘的粗度都必须适当控制,以保证与之相连的电子装置的性能。光学元件的表面粗度会导致散射。表面粗糙度在机械、电子和光学系统性能 I. Introduction Surface roughness plays an important role in the fields of mechanics, electronics and optics. Wear in a mechanical system is closely related to the thickness of the contact surface that moves relative to one another. The thickness of the silicon or computer disk must be properly controlled to ensure the performance of the electronics connected to it. The optical element’s surface roughness can lead to scattering. Surface roughness in mechanical, electronic and optical system performance