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本文介绍了容栅传感器测量位移的工作原理及其研究应用发展概况,并给出了分辨率为1’的容栅测角数显仪的具体设计。
This paper introduces the working principle of capacitance grid sensor measuring displacement and its application development overview, and gives the concrete design of capacitance grid angle measuring instrument with resolution of 1 ’.