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工件大多在交变应力下服役，薄膜的剥落是一个长时间高周次过程，其失效过程属疲劳失效。采用高周次界面疲劳强度作为膜基结合强度的判据；以膜基界面处的切应力幅△て表征膜基界面疲劳强度。采用该方法对气相沉积硬质薄膜的结合强度进行了评定；并与划痕法比较。结果表明；薄膜在膜基界面处剥落，该方法对界面因素十分敏感而对非界面因素不敏感，因而是一个有效的测量膜基界面结合强度的方法。可用来比较不同方法制备的不同成分和硬度的膜基结合强度。也指出了提高膜基结合强度的途径。
Workpieces are mostly under alternating stress service, film peeling is a long period of high frequency process, the failure process is fatigue failure. The fatigue strength of the interface at high frequency was used as the criterion for the bonding strength of the film base. The fatigue strength at the film-base interface was characterized by the amplitude of shear stress △ て at the film-base interface. This method was used to evaluate the bonding strength of vapor-deposited hard films and compared with the scratch method. The results show that the film peels off at the film-based interface. This method is sensitive to interface factors and insensitive to non-interface factors, which is an effective method to measure the bonding strength of film-based interface. Can be used to compare the different composition and hardness of different methods of film-based bonding strength. Also pointed out ways to improve the film-based bonding strength.