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立方氮化硼（ｃ－ ＢＮ） 在机械、热、电子及光学方面有许多优异性能，因此世界上有很多研究人员从事ｃ－ ＢＮ 薄膜制备的研究，近年来薄膜沉积技术和ｃ－ ＢＮ 薄膜质量都已取得显著进步。介绍ｃ － ＢＮ 薄膜的用途、结构、制备方法及存在的问题。重点总结了控制ｃ－ ＢＮ 相形成的关键因素及ｃ－ ＢＮ 相形成机理。
CBN (c-BN) has many excellent mechanical, thermal, electronic and optical properties, so many researchers in the world engaged in the preparation of c-BN thin film in recent years, thin film deposition technology and c-BN film quality Have made significant progress. The purpose, structure, preparation method and existing problems of c - BN film are introduced. The key factors controlling the formation of c-BN phase and the formation mechanism of c-BN phase are summarized emphatically.