一、概述在工业生产中大量使用着差压传感器,用以测定流量、压力、液位和密度。自动化水平的提高对压力测量技术提出了更高的要求。出现了一批应用新原理的传感器。电容式压力传感器是七十年代发展最快的新型传感器之一,自从问世以来就以体积小、精度高、频响好、微压测量性能好以及结构简单等优点而受到广泛的重视。五十年代就开始了电容式压力传感器的研究,六十年代初提出了实施方案。由于机 I. Overview Differential pressure sensors are widely used in industrial production to measure flow, pressure, liquid level and density. Increasing the level of automation of pressure measurement technology put forward higher requirements. A number of sensors have emerged that apply new principles. Capacitive pressure sensor is one of the fastest growing new sensors in the seventies. Since it was introduced, capacitive pressure sensor has gained wide attention due to its advantages such as small size, high precision, good frequency response, good micro-pressure measurement performance and simple structure. Fifties began capacitive pressure sensor research, the early sixties put forward the implementation plan. Thanks machine