利用集成工艺,Knerr等人首先研制成功L波段薄膜型集总元件的铁氧体环行器。其后,很多人用稍异的工艺,以类似的结构,相继做出性能良好的同类器件。薄膜型集总元件环行器的电路示意图见图1,其核心部分是一个非互易结。这个结是由在一块抛光的微波铁氧体基片上,采用绝缘交迭工艺制造成的三个互相交迭、彼此绝缘、并相间120°的电感线圈所构成。图1示出的12个相互交叉交迭点是分别用ZrO_2——空气双层介质或单层空气介质作绝缘隔离层制成的。前者工艺过于繁难,后者则使器件承受不了较大 Using an integrated process, Knerr et al first developed a ferrite circulator that succeeded in L-band thin-film lumped elements. Since then, many people use a slightly different process, with a similar structure, have made good performance of similar devices. Schematic diagram of the circuit diagram of the film type lumped element circulator, the core of which is a non-reciprocal junction. The junction consists of three inductive coils of mutually overlapping, insulated, 120 ° phase to one another fabricated on a polished microwave ferrite substrate using an insulating overlap process. Figure 12 shows the intersection of 12 intersections are respectively ZrO2 - air double layer medium or a single layer of air medium made of insulating insulation layer. The former process is too complicated, the latter can not afford the device larger