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本文在分析三维激光烧蚀加工加工精度的控制策略的基础上，开发了一套在线测量控制系统。以声光调QYAG激光的连续输出光作为测量光源，采用光学三角测量装置在线检测待加工表面相对指定位置的偏移，测得信号闭环控制声光调QYAG激光巨脉冲的发射，从而显著提高了沿光轴方向烧蚀加工位置的确定度和加工精度。
Based on the analysis of the control strategy of three-dimensional laser ablation machining accuracy, an online measurement control system was developed. The continuous output light of acousto-optic QYAG laser was used as measuring light source. The optical triangulation device was used to detect the deviation of relative position from the surface to be machined. The signal closed-loop control of the emission of acousto-optic QYAG laser giant pulse was significantly improved Along the optical axis ablation processing position of the degree of determination and processing accuracy.