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本文介绍了 RF溅射制备湿度敏感膜技术 ,讨论了衬底温度、工作气体及压力、放电电压及时间对湿敏膜感湿特性的影响。实验结果表明 ,只要认真控制上述工艺条件便可以制成感湿特性良好的湿度敏感膜
In this paper, the technology of RF sputtering for preparing humidity-sensitive film is introduced. The effects of substrate temperature, working gas and pressure, discharge voltage and time on the wet-sensing characteristics of humidity-sensitive film are discussed. The experimental results show that as long as the above process conditions are carefully controlled, the humidity-sensitive film