背散射因子是俄歇定量分析中要考虑的主要因素。本文提出一种利用微分前俄歇谱N(E)背景求得背散射因子的新方法。由于使背散射因子的计算与能谱相结合,这种方法不但可以避免Monte Carlo的冗长计算,还能进一步提高定量分析的精度。文中列举了用该方法对Au-Cu和Ag-Cu两种合金的定量分析结果,并与Monte Carlo和相对灵敏度因子方法的结果进行了比较。 Backscattering factor is the main factor to be considered in Auger’s quantitative analysis. In this paper, we propose a new method to derive the backscattering factor using the pre-differential Auger N (E) background. This method not only avoids the lengthy calculation of Monte Carlo but also improves the accuracy of quantitative analysis by combining the calculation of backscatter factor with the energy spectrum. In this paper, the quantitative analysis results of Au-Cu and Ag-Cu alloy by this method are listed and compared with the Monte Carlo and relative sensitivity factor method.