A multi-objective scheme for structural topology optimization of distributed compliant mechanisms of micro-actuators in MEMS condition is presented in this work, in which mechanical flexibility and structural stiffness are both considered as objective functions. The compliant micro-mechanism developed in this way can not only provide sufficient output work but also have sufficient rigidity to resist reaction forces and maintain its shape when holding the work-piece. A density filtering approach is also proposed to eliminate numerical instabilities such as checkerboards, mesh-dependency and one-node connected hinges occurring in resulting mechanisms. SIMP is used as the interpolation scheme to indicate the dependence of material modulus on element-regularized densities. The sequential convex programming method, such as the method of moving asymptotes (MMA), is used to solve the optimization problem. The validation of the presented methodologies is demonstrated by a typical numerical example. A multi-objective scheme for structural topology optimization of distributed compliant mechanisms of micro-actuators in MEMS condition is presented in this work, in which mechanical flexibility and structural stiffness are both considered as objective functions. The compliant micro-mechanism developed in this way can not only provide sufficient output work but also have sufficient rigidity to resist reaction forces and maintain its shape when holding the work-piece. A density filtering approach is also proposed to eliminate numerical instabilities such as checkerboards, mesh-dependency and one-node connected hinges occurring in resulting mechanisms. The sequential convex programming method, such as the method of moving asymptotes (MMA), is used to solve the optimization problem. The validation of the presented methodologies is demonstrated by a typical numerical exa mple.