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本文叙述了使用等离子体辅助反应蒸发法在有机玻璃基底上制备透明导电ITO膜的研究结果。成功地在室温的条件下,制备出了高透明的、满足防静电要求的产品。
This paper describes the results of studies on the preparation of transparent conductive ITO films on plexiglas substrates using plasma-assisted reactive evaporation. Successfully at room temperature conditions, prepared a high transparency, to meet the anti-static requirements of the product.