Tantalum and copper layers were deposited on a thermally oxidized Si substrate in a magnetron sputtering process.Nanoind......

说明了残余应力测量技术在工程领域中的重要意义，描述了残余应力测量方法的研究状况，介绍了目前残余应力的测量方法，例如钻孔法、X射......