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[期刊论文] 作者：Nagendra Parasad Yadav,Ji-Chuan Xiong,Wei-Ping Liu,Wei-Ze Wang,Yun Cao,Ashish Kumar,Xue-Feng Liu,
来源：电子科技学刊:英文版 年份：2021
The quantitative optical measurement of deep sub-wavelength features with sub-nanometer sensitivity addresses the measurement challenge in the semiconductor fabrication process.Optical scatterings from the sidewalls of patterned devices rev......
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