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本文根据Maher Ⅰ.Boulos的“感应耦合射频等离子体”一文,重点介绍其中的感应耦合射频等离子体的基本原理,主要的设计特点和应用部分。
Based on the article “Inductively Coupled RF Plasma” by Maher I. Boulos, the basic principle, main design features and application of inductively coupled RF plasma are briefly introduced.