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在大多数的真空环境的科学试验中,多数都会用到光学器件,而在真空环境中,粒子的运动自由程非常大,一旦真空环境中存在粒子化(分子、离子、原子、粒子团)的工作物质或附带杂质,都会对光学元件造成污染从而破坏光学器件的特性,大大减小光学器件的使用寿命,本文主要提供一种装置和方法,可以确保光学器件的使用寿命,维持光学器件的自身特性。
In most of the scientific experiments in the vacuum environment, optical devices are mostly used. In a vacuum environment, the freedom of movement of particles is very large. Once the vacuum environment has particles (molecules, ions, atoms, particle clusters) The working substance or incidental impurities will pollute the optical components and damage the characteristics of the optical components, thereby greatly reducing the service life of the optical components. This document mainly provides a device and a method for ensuring the service life of optical components and maintaining the optical components themselves characteristic.