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为提高LiFePO_4敏感薄膜元件的灵敏度,以铂(Pt)作为掺杂元素,用水热法一步合成出LiFe_(0.98)Pt_(0.02)PO_4粉末;利用旋涂法将其固定在锡掺杂玻璃光波导表面,制备了LiFe_(0.98)Pt_(0.02)PO_4薄膜/锡掺杂玻璃光波导元件。将敏感薄膜在不同温度下热处理,通过比较各个敏感薄膜元件对苯类挥发性有机气体的响应讨论薄膜处理温度对LiFe_(0.98)Pt_(0.02)PO_4薄膜元件光学特性及气敏性的影响。结果显示,在450℃下处理的薄膜因具有光学透明性好、折射率高、光传播损失小等特点对苯类气体显出较大的响应,能够检测出浓度为1×10~(-7)~1×10~(-3)V/V_0的二甲苯气体。当气体浓度小于1×10~(-6)V/V_0时,其他苯类气体不会对二甲苯的检测产生影响。
LiFe_ (0.98) Pt_ (0.02) PO_4 powders were synthesized by hydrothermal method with platinum (Pt) as the doping element in order to improve the sensitivity of the LiFePO_4 thin films. Surface, a LiFe_ (0.98) Pt_ (0.02) PO_4 thin film / tin-doped glass optical waveguide device was prepared. The sensitive films were heat-treated at different temperatures. The effects of the film processing temperature on the optical properties and gas sensitivity of LiFe_ (0.98) Pt_ (0.02) PO_4 thin film devices were discussed by comparing the response of each sensitive thin film device to benzene-based volatile organic gases. The results showed that the films treated at 450 ℃ exhibited a large response to benzene gas due to their good optical transparency, high refractive index and small light propagation loss. The results showed that the concentration of benzene at 1 × 10 -7 ) To 1 × 10 -3 V / V 0 xylene gas. When the gas concentration is less than 1 × 10 -6 V / V 0, other benzene gases will not affect the detection of xylene.