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一、化学气相沉积(CVD)十几年来,用化学气相沉积法在硬质合金、工具钢、模具钢等基础上建立的涂层,有碳化物,氪化物,碳氮化合物、氧化物、硼化物,硅化物和多层复合涂层等八大类。在六、七十种涂层中,国内外应用较广的是碳化钛和氮化钛涂层。1.碳化物涂层钛、钒、铬等碳化物层的气相沉积,通常以氢气
First, the chemical vapor deposition (CVD) For more than a decade, the use of chemical vapor deposition method in carbide, tool steel, die steel based on the established coatings, carbide, krypton, carbonitrides, oxides, boron Chemical compounds, silicide and multi-layer composite coating eight categories. In six, seventy kinds of coating, widely used at home and abroad are titanium carbide and titanium nitride coating. 1. Carbide coating Titanium, vanadium, chromium and other carbide layer vapor deposition, usually with hydrogen