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用直流气体放电活化反应蒸发沉积技术在普通玻璃基片上制备了ZnO／SnO2及SnO2／ZnO超微粒子（UPF）双层复合薄膜。样品经扫描电子显微镜（SEM）和X射线衍射仪分析，结论为超微粒子的复合薄膜。同时提出了最佳制备工艺。气敏测试结果表明：ZnO／SnO2及SnO2／ZnOUPF复合膜较单层ZnO及SnO2UPF表现出优良的选择性，其灵敏度和最佳工作温度也得到相应的改善。
ZnO / SnO2 and SnO2 / ZnO ultrafine particles (UPF) bilayer composite films were prepared on a common glass substrate by DC gas discharge activation evaporation deposition technology. The samples were analyzed by scanning electron microscopy (SEM) and X-ray diffractometry (XRD), and the result was composite films of ultrafine particles. At the same time proposed the best preparation process. The results of gas-sensing test show that the ZnO / SnO2 and SnO2 / ZnOUPF composite films show better selectivity than single-layer ZnO and SnO2UPF, and their sensitivity and the best working temperature are also improved.