本文详细介绍了在微波频段,高阻硅衬底上的超导共面波导谐振腔的研究,包括设计方法、制备流程、实验测量和数据分析,并且对NbN和Nb两种材料进行了实验对比.由于超导体中动态电感的存在,我们还对两种超导材料在不同厚度的情况下进行了测量,并且与理论计算结果进行了比较. In this paper, the research of superconducting coplanar waveguide resonator in microwave frequency and high resistivity silicon substrate is introduced in detail, including the design method, preparation flow, experimental measurement and data analysis, and the experimental comparison of two materials NbN and Nb Due to the dynamic inductance in superconductors, we also measured the superconducting materials at different thicknesses and compared them with the theoretical results.