论文部分内容阅读
提出了一种平行尺补偿方法 ,可以对一维和二维情况由于违背阿贝原则的长度测量所引起的误差进行补偿。计算表明 ,对于直线度为 1′的直线运动导轨 ,在一维情况下违背阿贝原则 ,用双平行尺补偿与符合阿贝原则的测量仅增加 0 0 3μm的误差 ;而在相同情况下 ,无平行尺补偿的不符合阿贝原则的测量将产生 30 μm的误差。对于二维情况下的三平行尺补偿的计算也有相同的结论。计算分析表明 ,平行尺补偿有较高的补偿精度。并且简单易行 ,这种补偿原理可以看作为对阿贝原则的推广 ,对于长度测量仪器的设计提出了一种新的思路
A parallel ruler compensation method is proposed, which can compensate the errors caused by one-dimensional and two-dimensional measurement due to Abbe’s length. The calculation shows that for a linear guide with a straightness of 1 ’, the Abbe’s principle is violated in one-dimensional case, and the error of double parallel ruler compensation and the measurement conforming to the Abbe rule is only increased by 0 0 3μm; in the same situation, Measurements that do not conform to the Abbe rule without compensation of a parallel ruler result in an error of 30 μm. The same conclusion is drawn for the calculation of three parallel ruler compensation in two dimensions. The calculation and analysis show that the parallel ruler compensation has a higher compensation accuracy. And simple and easy, this compensation principle can be seen as the promotion of the Abbey principle, for the length of the measurement instrument design puts forward a new idea