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硅微谐振加速度计具有体积小、功耗低、准数字量输出和精度提升大的优点,是一种具有良好应用前景的高精度MEMS惯性仪表。总结分析了近些年国内外在硅微谐振加速度计方面的研究现状,主要在结构设计及工艺、测控电路设计等方面阐述了各自特点。最后,结合近些年MEMS惯性仪表的发展趋势,对硅微谐振加速度计晶圆级真空封装、测控电路数字化、仪表补偿智能化3个发展方向进行了展望。
Silicon microresonance accelerometer has the advantages of small size, low power consumption, quasi-digital output and high accuracy, it is a kind of high precision MEMS inertial instrument with good application prospect. The research status of silicon microresonance accelerometer at home and abroad is summarized and analyzed in the recent years, and its characteristics are mainly described in terms of structure design, process and circuit design. Finally, combined with the development trend of MEMS inertial instruments in recent years, the development trend of wafer-level vacuum packaging of silicon microresonance accelerometer, digitization of measurement and control circuit, and intelligent compensation of instrumentation are prospected.