近年来,对固体材料的薄层、微区分析,尽管发展了以电子、离子、光子作为入射束的各种“探针”方法及其与之相应的丰富多样的仪器和技术。但是由于这些现代仪器价格昂贵,目前还不能普遍使用,且每种仪器在实际分析过程中的运用,都各有面临着某些方面的不足。与其它任何一种分析技术和仪器设备一样,这些最现代化的技术、仪器设备也有它的局 In recent years, the thin layer and micro-area analysis of solid materials have been developed in spite of the development of various “probe” methods using electrons, ions and photons as incident beams and the corresponding rich variety of instruments and techniques. However, due to the high cost of these modern instruments, they are still not universally applicable at present, and each of them has some shortcomings in the actual analysis. Like any other analytical technique and instrumentation, these most modern technologies and instruments have their own