论文部分内容阅读
提出一种用电涡流传感器实现无损在线测量工件金属膜厚度的方法。给电涡流传感器同时施加３种不同频率的激励信号， 通过传感器与各层金属膜所感应的电涡流密度， 可以间接获得２ 层不同材料的金属膜厚度， 同时还可获得传感器与表层被测工件表面的距离。理论分析和实验结果表明了这种方法的可行性
A method of non-destructive in-line measurement of workpiece metal film thickness by using eddy current sensor is proposed. The eddy current sensor is applied with three different excitation signals at the same time. The eddy current density induced by the sensor and each layer of metal film can indirectly obtain the thickness of two metal films of different materials, and at the same time, the sensor and the workpiece under test can be obtained Surface distance. Theoretical analysis and experimental results show the feasibility of this method