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来自硅的雪崩载流子注入时MNOS结构介质膜中的荷电现象=[刊.俄]/-1993.22(2).-31~37金属(或重掺杂半导体)-氮化硅-二氧化硅-硅(MNOS)结构,在现代微电子学中有着广泛的应用。显然,和热生长二氧化硅膜相比。上述双层电介质具有一系...
Charged phenomenon of MNOS structure dielectric film when avalanche carriers from silicon are implanted. Russian] / - 1993.22 (2). -31 ~ 37 metal (or heavily doped semiconductor) - silicon nitride - silicon dioxide - silicon (MNOS) structure, has a wide range of applications in modern microelectronics. Obviously, compared to thermally grown silica membranes. The double-layer dielectric has a series of ...