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用PHI 600型扫描俄歇探针、200型台阶仪和Q-920型图象分析仪,测定了35Cr Ni3MoV钢、Al-5.5 Zn-1.4Mg合金和Ti-5Al-2.5Sn合金的溅射速率,提出了对蚀坑分部位确定溅射速率的方法。文中给出了详细的测定结果。
The sputter rates of 35Cr Ni3MoV steel, Al-5.5Zn-1.4Mg alloy and Ti-5Al-2.5Sn alloy were measured with a PHI 600 scanning Auger probe, a 200-stage instrument and a Q-920 image analyzer , Put forward a method of determining the sputtering rate for the etching pits. The article gives the detailed measurement results.