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基于设计的分级将来自设计数据的版图信息与检测到的每个缺陷的相对位置结合起来,利用这种方法可提高缺陷帕雷托质量。通过对系统缺陷和有害缺陷进行分级,可以改进SEM检测。
Design-based grading Combines layout information from design data with the relative position of each defect detected to improve defect Pareto quality. By ranking system defects and harmful defects, SEM testing can be improved.