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采用磁控溅射镀膜工艺,在Fe_(73.5)Cu_1Nb_3Si_(13.5)B_9非晶条带的光滑面上溅射了130~650 nm厚的Ni_(80)Fe_(20)薄膜,制备了一系列Ni_(80)Fe_(20)/Fe_(73.5)Cu_1Nb_3Si_(13.5)B_9复合结构样品.研究了镀层厚度对材料的镀层形貌、巨磁阻抗效应(Giant Magneto-Impedance,GMI)和磁滞回线的影响.结果发现,镀层厚度为260 nm厚时,样品的表面形貌最平整致密,最大磁阻抗比提高到33.0%.在玻璃基片上溅射了相同厚度的系列Ni_(80)Fe_(20)薄膜,其磁滞回线结果发现薄膜的各向异性方向随着厚度的增加由平行表面转变成垂直于表面.正是Ni_(80)Fe_(20)镀层各向异性的方向改变,影响了镀层与条带间的相互作用,进而影响复合结构样品的磁阻抗效应.
A series of Ni_ (80) Fe_ (20) thin films with a thickness of 130 ~ 650 nm were sputtered on the smooth surface of Fe_ (73.5) Cu_1Nb_3Si_ (13.5) B_9 amorphous ribbons by magnetron sputtering. (80) Fe_ (20) / Fe_ (73.5) Cu_1Nb_3Si_ (13.5) B_9 composites were studied.The effects of coating thickness on the coating morphology, Giant Magneto-Impedance (GMI) and hysteresis loop The results show that the surface morphology of the sample is the most compact and dense with the thickness of 260 nm, and the maximum magnetic impedance ratio increases to 33.0% .A series of Ni_ (80) Fe_ (20) The hysteresis loop of the film shows that the anisotropic direction of the film changes from parallel to perpendicular to the surface as the thickness increases.It is the change of orientation of the anisotropy of the Ni_ (80) Fe_ (20) coating that affects the coating And the interaction between the strips, thus affecting the composite structure of the sample magnetoresistance effect.