一种基于光压和干涉的激励/探测方法可表征微电机械系统(MEMS)万向反射镜阵列的特性。这种全光技术除能精确地完成非接触式的工艺监控,也使远距离操作微光电机械系统成为可能。光MEMS是一种采取与大型光学元件相同方式进行光控制的微型器件,其在质量、体积、功耗等方面具有明显 A light pressure and interference based excitation / detection method characterizes the MEMS gimbaled mirror array. This all-optical technology, in addition to being able to perform non-contact process monitoring accurately, also makes it possible to operate microlometromechanics remotely. Optical MEMS is a type of micro-device that is light-controlled in the same way as large-scale optical components, and has obvious advantages in terms of mass, volume, power consumption and the like