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针对半导体制造中有滞留时间约束的集束型装备,研究了临时晶圆到达时的在线调度问题,描述了调度问题域,建立了问题的数学模型,并根据模型提出了两层调度方法.外层算法通过粒子群优化过程求解临时晶圆的加工顺序;内层算法在给定加工顺序的基础上,采用前向和后向递推方法获得可行解空间,并从可行解空间获得最优完工时间.从理论上证明了算法的可行性,并通过仿真结果表明,该方法对求解大规模临时晶圆的调度问题是十分有效的.
Aiming at the cluster equipment with dwell time constraints in semiconductor manufacturing, the online scheduling problem when the temporary wafer arrived is described, the scheduling problem domain is described, the mathematical model of the problem is established, and the two-tier scheduling method is proposed according to the model. The algorithm solves the processing sequence of the temporary wafer through the particle swarm optimization process. The inner layer algorithm obtains the feasible solution space using the forward and backward recursion methods based on the given processing sequence, and obtains the optimal completion time from the feasible solution space The feasibility of the algorithm is proved theoretically, and the simulation results show that this method is very effective in solving the large scale temporary wafer scheduling problem.