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我们采用了新的算法对二值位相光栅进行了设计,并对制作时可能产生的误差及它们对位相光栅的衍射效率和光强均匀性的影响进行了讨论。我们用薄膜沉积的方法进行了位相光栅的制作,对光栅进行了实际测量,把测量结果与理论值进行了比较,结论与我们的理论分析相符。
We used a new algorithm to design the binary phase grating, and discussed the possible errors in fabrication and their effects on the diffraction efficiency and intensity uniformity of the phase grating. We fabricated the phase grating by thin-film deposition, measured the grating and compared the measured result with the theoretical value. The conclusion is consistent with our theoretical analysis.