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对影响金属氧化物薄膜气敏元件测量可靠性的因素——测试电压ＶＴ和湿度［Ｈ２Ｏ］进行了实验研究：给出了灵敏度Ｓｎ随测试电压ＶＴ变化的曲线，得出了存在一个Ｓｎ稳定的测试电压区间；给出了Ｓｎ随［Ｈ２Ｏ］变化曲线的形式，得出了Ｓｎ随［Ｈ２Ｏ］变化的相对起伏是大的结果；研究了相对灵敏度Ｓｎ′≡Ｓｎ（Ｃ０）／Ｓｎ（Ｃｓ），得出了Ｓｎ′基本不随湿度变化的结果．
The factors influencing the measurement reliability of the metal oxide thin film gas sensor - the test voltage VT and the humidity [H2O] are studied experimentally: the curve of the sensitivity Sn with the test voltage VT is given, and a Sn-stable The relation between Sn and H 2 O was studied. The relative sensitivity of Sn’≡Sn (C0) / Sn (Cs) , It is concluded that Sn ’basically does not change with humidity.