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通过对多晶硅生产过程中的主要危险品氢气、液氯、氯化氢和三氯氢硅的理化性质分析以及主要生产工艺过程的火灾危险性分析 ,提出多晶硅生产过程中应注意的消防安全技术措施
Based on the analysis of the physical and chemical properties of hydrogen, liquid chlorine, hydrogen chloride and trichlorosilane which are the main dangerous substances in the polysilicon production process and the fire risk analysis of the main production process, the fire safety technical measures that should be noticed in the production of polysilicon