论文部分内容阅读
根据扫描探针声显微镜(SPAM)轻敲工作模式中探针作周期振动的特点,以及在探针与试样相接触过程中激振力和悬臂探针自由振动的阻尼力很小的假设下,解析求解了探针与试样的碰撞运动方程,得到了最大压痕深度和碰撞时间与探针半径、等效杨氏模量以及界面吸附能等之间的关系式,较直观地说明了SPAM中轻敲模式的相位像反差机理:信号的相位与试样微区的性质、探针振幅、设置点以及试样形貌等有关。并定量预计了纳米金刚石像中的相位差值72.59°,与实验测量平均值73.2°±8.2°一致。同时,合理地解释了实验得到的光学薄膜试样相位像的反差。这些表明SPAM轻敲模式的相位成像是一种纳米分辨率测量材料表面物理性质的成像技术。
According to the characteristics of the periodic vibration of the probe in the working mode of the scanning probe acoustic microscope (SPAM) and the small damping force of the excitation force and the free vibration of the cantilever probe during the contact between the probe and the sample , The collision equation of probe and sample was solved and the relation between maximum indentation depth, collision time and probe radius, equivalent Young’s modulus and interfacial adsorption energy was obtained. The tapping pattern phase contrast in SPAM mechanism: the phase of the signal is related to the properties of the sample zone, the probe amplitude, the set point and the morphology of the sample. And quantitatively estimated the phase difference value in the nanodiamond image by 72.59 °, which is consistent with the experimental measurement average of 73.2 ° ± 8.2 °. At the same time, a reasonable explanation of the optical phase of the sample obtained by the contrast of the phase image. These show that phase imaging of the SPAM tapping mode is an imaging technique that measures the surface physical properties of materials at nanometer resolution.