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采用磁控溅射方法在自然氧化的单晶Si(100)衬底上制备了纳米结构的Fe53Pt47薄膜,并研究热处理后薄膜中的磁相互作用、晶粒尺寸与热处理温度的关系.经400℃热处理后,FePt薄膜中有明显的面心四方相形成,薄膜表现出硬磁性,晶粒尺度在20nm,薄膜内部存在软硬磁交换耦合作用;随着热处理温度升高,硬磁相含量增加.同时由于FePt薄膜的晶粒长大,部分软硬磁晶粒之间的交换耦合作用失效;600℃热处理后,FePt的面心立方相已经完全转变为面心四方相,薄膜矫顽力由硬磁相之间的静磁作用贡献.
The nanostructured Fe53Pt47 thin films were prepared by magnetron sputtering on a naturally oxidized Si (100) substrate and the relationship between the magnetic interactions and the grain size and the heat treatment temperature was investigated. After heat treatment, the FePt thin films have obvious face-centered tetragonal phase. The films show hard magnetism with the grain size of 20nm. The magnetic-hard magnetic exchange coupling exists in the film. With the increase of the heat treatment temperature, the content of the hard magnetic phase increases. At the same time, due to the grain growth of FePt films, the exchange coupling between some hard and soft magnetic grains failed. After the heat treatment at 600 ℃, the face-centered cubic phase of FePt has completely transformed into face-centered tetragonal phase. Magnetism between the role of magnetostatic contribution.