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论述0.1μm精度三维互感式测头的设计原则和设计的初始依据。对结构设计的方法、结构尺寸的选择、主要技术参数的确定、零部件公差的制定以及影响测头精度的主要因素等方面进行了理论分析和计算。同时给出了该测头的检定数据,证明与理论计算相一致。
Discussed the design principle and design basis of 0.1μm precision three-dimensional mutual-sensing probe. The methods of structure design, the selection of structure size, the determination of the main technical parameters, the formulation of the parts tolerance and the main factors that affect the accuracy of the probe are analyzed theoretically and calculated. At the same time, the test data of the probe is given, which is in agreement with the theoretical calculation.