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一个适用于光纤通信系统中的 1× 8多模干涉功率分束器被设计并通过ICP刻蚀方法成功研制 .这种基于SOI材料的功率分束器是采用多模波导作为输入 /输出波导 ;经过光束传播方法模拟 ,该器件显示出了优良的性能 .测试结果表明 ,在 15 5 0nm波长处器件的传波损耗低于 0 80dB ,损耗均匀性为 0 4 5dB ,而且偏振相关损耗低于0 70dB .器件的尺寸只有 2mm× 10mm .
A 1 × 8 multimode interference power splitter suitable for use in optical fiber communication systems was designed and successfully developed by ICP etching.The SOI material based power splitter employs a multimode waveguide as an input / output waveguide, After the beam propagation simulation, the device shows excellent performance.The test results show that the transmission loss of the device is lower than 0 80dB, the loss uniformity is 0 45dB and the polarization-dependent loss is lower than 0 at a wavelength of 1550nm 70dB. The size of the device is only 2mm × 10mm.