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由日本岛津制作所研制并推向市场的SFT—98O0型表面观察装置能以纳米级精度高倍率观察,并能三维测量硬盘、硅片等大型试样的表面.该装置利用了原子力显微镜,其原理是把非常小的悬臂靠近试样表面,将悬臂和试样之间的作用力(原子力)转换成悬臂变位,以测定表面形状.该装置备有大型试样用的精密XY载物台,不需蒸镀等前处理,就可以像扫描显微镜那样观测最大尺寸400mm×500mm的大型试样,从而缩短了检查时间,提高了检查效率.另外,作用于试样的力非常小,因此不必担心损伤问题.由于主体测量部分利用装有隔音箱的专用除振台,并由刚性
Developed by Shimadzu Corporation and marketed in Japan, the SFT-98O0 surface observation device can be observed at high nanoscale magnification and can measure the surface of large samples such as hard disks and silicon wafers three-dimensionally. The device uses atomic force microscopy, The principle is that a very small cantilever is placed near the surface of the specimen and the force (atomic force) between the cantilever and the specimen is converted into a cantilever displacement to determine the surface shape.The device is equipped with a precision XY load Taiwan, without the need for deposition and other pre-treatment, you can look like a scanning microscope, the largest size of 400mm × 500mm large sample, thus shortening the inspection time and improve the inspection efficiency.In addition, the force acting on the sample is very small, therefore Do not have to worry about the damage problem.Because the main part of the measurement using a special anti-vibration box installed soundproof box, and by the rigid