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基于微机电系统(MEMS)的光栅平动式光调制器(光栅平动式光调制器)调制性能的实验研究关系到其进一步应用。设计了光栅平动式光调制器的相干光学信息处理系统实验方案,He-Ne激光器出射的光束经扩束器和准直透射后成为平行光入射光栅平动式光调制器,被测光栅平动式光调制器放置在相干光学信息处理系统的输入面,滤波器在频谱面上,显微镜放大像面上的信号,经CCD在计算机上记录存储;实验结果和理论分析吻合。对光栅平动式光调制器进行方案优化,将可动光栅边框和悬臂梁表面处理成不反光,使可动光栅和下反射镜构成的整个反射面为光栅周期的整数倍。经理论计算,在光栅周期为8μm,光栅占空比为0.5,光栅边距为2μm,周期数为6的条件下,光栅平动式光调制器图像填充率为74.67%,光学效率为81.06%,衬比度大于5000∶1。
The experimental research on the modulation performance of grating translational light modulator based on micro-electromechanical system (MEMS) relates to its further application. The experimental scheme of the coherent optical information processing system of grating translational light modulator is designed. The beam emitted by He-Ne laser becomes a parallel light incident grating translational light modulator after beam expander and collimation transmission, The dynamic light modulator is placed on the input side of the coherent optical information processing system. The filter is on the spectrum plane. The signal on the image plane is amplified by the microscope and recorded on the computer by the CCD. The experimental results are in good agreement with the theoretical analysis. The scheme of the grating translational light modulator is optimized, the movable raster frame and the cantilever surface are processed to be non-reflective, so that the entire reflective surface formed by the movable grating and the lower reflector is an integral multiple of the grating period. According to the theory of theory, under the condition of grating period 8μm, grating duty cycle 0.5, grating margin 2μm and number of cycles 6, the image filling rate of the grating translational light modulator is 74.67% and the optical efficiency is 81.06% , Contrast ratio greater than 5000: 1.