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提出了一种基于菲涅耳衍射微透镜的新型光学加速度传感器,它能够解决导航系统中惯性传感器普遍存在的抗电磁干扰和电磁冲击能力差等缺陷。其传感原理是把一个反光膜平行地置于衍射微透镜的后方,加速度的变化会改变反光膜的位置,根据微透镜前方会聚点处光强的变化,感知加速度的大小。介绍了传感器及其动力学系统的工作原理,并对衍射微透镜和动力学系统的微弹性机械结构进行了设计和加工,最后对传感器的性能和误差进行了分析。原理验证性实验的结果表明这种新型光学加速度传感器的原理正确,并且结构简单,灵敏度高。
A new type of optical acceleration sensor based on Fresnel diffraction microlens is proposed, which can solve the common defects of inertial sensor in navigation system such as anti-electromagnetic interference and poor electromagnetic impact ability. The sensing principle is to place a reflective film parallel to the rear of the diffractive microlens. The change of acceleration will change the position of the reflective film. According to the change of light intensity at the converging point in front of the microlens, the sensing of the acceleration will be done. The working principle of the sensor and its dynamic system is introduced. The design and processing of the micro-elastic mechanical structure of the diffractive micro-lens and the dynamic system are also carried out. Finally, the performance and error of the sensor are analyzed. The results of the principle verification experiment show that the principle of the new optical acceleration sensor is correct, and the structure is simple and the sensitivity is high.