论文部分内容阅读
A new precision piezoelectric actuator is proposed to improve its drive capabilities. The actuator is based on the piezoelectric technology. It adopts the principle of bionics and works with a new method of stator initiative anchoring/loosen and a distortion structure of double-side thin flexible hinge. It solves the problem of anchoring/loosen, frequency, journey, resolution and velocity. The experiment shows that the new linear piezoelectric actuator works with high frequency (100 Hz), high speed (502 μm/s), large travel (>10 mm), high resolution (0.05 urn) and high load (100 N). This kind of new piezoelectric actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some micromanipulation field.
A new precision piezoelectric actuator is proposed to improve its drive capabilities. The actuator is based on the piezoelectric technology. It adopts the principle of bionics and works with a new method of stator initiative anchoring / loosen and a distortion structure of double-side thin flexible hinge. It solves the problem of anchoring / loosen, frequency, journey, resolution and velocity. The experiment shows that the new linear piezoelectric actuator works with high frequency (100 Hz), high speed (502 μm / s) 10 mm), high resolution (0.05 urn) and high load (100 N). This kind of new piezoelectric actuator will be applied for large travel and high resolution driving device, optics engineering, precision positioning and some micromanipulation field.