一、前言利用接触测量法进行尺寸和形状测量时,所用测头的特性对测量产生极大影响。尤其是可靠性要求高的尺寸测量,需要在确知被测件的形状之后方可求得欲求尺寸大小。供形状测量用的测头,其静态和动态特性将导致测量结果准确度急剧变动。形状测量大致归纳为两类,一类是象表面 I. INTRODUCTION The use of touch probes for measurement of size and shape has a significant influence on the measurement. In particular, the reliability of the high dimensional measurements, the need to know the shape of the measured device can be obtained after the request size. For shape measurement with the probe, the static and dynamic characteristics of the measurement results will lead to sharp changes in accuracy. Shape measurement can be roughly divided into two categories, one is like the surface