用光学衍射环状花样检验透射电镜点分辨率,要比从图象直接测量间距更为正确,厂商和用户都正在推广这种检验法。在高分辨率成像领域内,象衬度主要是相位衬度。电子波穿越很薄的“弱相位”物体时,物体结构产生的散射效应将只引起电子波微小的相位差(衬度)。为了在最终的象内把相位衬度转化为探测元件能感受的 Circular diffraction pattern with optical diffraction test TEM point resolution than the direct measurement of the image from the pitch is more correct, manufacturers and users are promoting this test. In the field of high-resolution imaging, image contrast is primarily phase contrast. When an electron wave passes through a thin “weak phase” object, the scattering effect of the structure of the object causes only a small phase difference (contrast) of the electron wave. In order to transform the phase contrast in the final image into the sensing element can feel