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为了快速准确检测电厂中的SO_2气体浓度,采用电化学阳极氧化法制备了不同含量Ag纳米粒子的TiO_2纳米管阵列(Ag/TNTA),涂敷于带有金电极的氧化铝陶瓷管表面形成敏感薄膜,设计了一种薄膜型管式SO_2传感器。采用X射线衍射仪和扫描电子显微镜表征了Ag/TNTA纳米管阵列的相组成和微观形貌,分析了Ag/TNTA纳米管阵列对SO_2敏感机理。在气体传感器静态测试系统上,测试了SO_2传感器灵敏度、动态响应、湿度、温度、抗干扰和长期稳定等特性。结果表明,以Ag/TNTA为敏感薄膜的SO_2传感器灵敏度为96.8%,动态响应时间为2.2~6.4 s,恢复时间为2.4~6.6 s。在某电厂中连续使用3个月后,响应衰减了4.3%。表明该SO_2传感器可实现电厂中SO_2气体在线检测。
In order to quickly and accurately detect the concentration of SO 2 in the power plant, TiO 2 nanotubes arrays (Ag / TNTA) with different content of Ag nanoparticles were prepared by electrochemical anodic oxidation and applied to the surface of alumina ceramic tube with gold electrode to form a sensitive Film, a thin film tube SO_2 sensor was designed. The phase composition and morphology of the Ag / TNTA nanotube arrays were characterized by X-ray diffraction and scanning electron microscopy. The mechanism of Ag / TNTA nanotube arrays sensing SO 2 was analyzed. In the gas sensor static test system, SO_2 sensor sensitivity, dynamic response, humidity, temperature, anti-jamming and long-term stability were tested. The results show that the sensitivity of SO_2 sensor with Ag / TNTA as sensitive film is 96.8%, the dynamic response time is 2.2 ~ 6.4 s, and the recovery time is 2.4 ~ 6.6 s. After 3 months of continuous use in a power plant, the response decreased by 4.3%. It shows that the SO_2 sensor can realize on-line SO_2 gas detection in power plant.