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Nd∶YAG激光回馈干涉仪已实现仪器化,但在实际应用中仍然存在不足。测量了Nd∶YAG微片激光器的基本参数,设计了红光指示装置、准直扩束装置和空气折射率补偿系统,完成了指示1064nm的不可见光的同时实现了量程提高和波长补偿,得到了使用更方便、量程更大、应用范围更广、测量精度更高的实用Nd∶YAG激光回馈干涉仪。
Nd: YAG laser feedback interferometer has been instrumental, but there are still some shortcomings in practical application. The basic parameters of Nd: YAG microtiter laser were measured. The red indicator, the collimating beam expander and the air refractive index compensation system were designed. At the same time, the range of 1064nm invisible light and wavelength compensation were achieved. Use more convenient, larger range, wider range of applications, higher accuracy of the practical Nd:YAG laser feedback interferometer.