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建造了一台微波等离子体增强化学气相沉积实验装置,利用该装置实验研究了微波功率、工作气体种类、工作气压及磁场位形对等离子体特性影响。结果表明,在(10~(-1)～10~3)Pa的气压范围内,获得了稳定的微波等离子体。实验证实了氩气参与放电和外加磁场有助于降低所需的微波击穿功率和对等离子体有一定稳定作用。
A microwave plasma-enhanced chemical vapor deposition experimental apparatus was built. The effects of microwave power, working gas type, working pressure and magnetic field shape on the plasma properties were experimentally studied. The results show that a stable microwave plasma is obtained in the pressure range of (10 ~ (-1) ~ 10 ~ 3) Pa. Experiments confirmed that the argon gas to participate in the discharge and applied magnetic field help to reduce the required microwave breakdown power and have some stability to the plasma.